MEMS Engineer Salary in Chicago, Illinois

How much does a MEMS Engineer make in Chicago, IL?

As of March 01, 2025, the average annual salary for a MEMS Engineer in Chicago, IL is $176,556. Salary.com reports that pay typically ranges from $161,530 to $191,795, with most professionals earning between $147,849 and $205,669.

Search MEMS Engineer Jobs in Chicago, IL

Develop a Job description

Pay Equity

2024 Compensation Trend

Benefits Consulting

Salary range for a MEMS Engineer

$161,530 to $191,795

Employers: Find Surveys For This Job

Employers: Price Your Company Jobs

View Average Salary for United States
Adjust MEMS Engineer Salary:
Select State
Select City in IL
Choose Similar Job
Pick Related Category
View Cost of Living in Chicago, Illinois

Facing Salary Structure Challenges? Let Our Expert Guide You

The job market is increasingly challenging. Our whitepaper, Navigating the Challenges of Creating Salary Structures, offers guidance on creating salary structures. Provide your phone number and work email to download the full version.

We will handle your contact details in line with our Privacy Policy. If you prefer not to receive marketing emails from Salary.com, you can opt-out out of marketing communications at any time by clicking unsubscribe.

MEMS Engineer

Review the job openings and experience requirements for the MEMS Engineer job to confirm that it is the job you are seeking.

See user submitted job responsibilities for MEMS Engineer.

Search MEMS Engineer Job Openings

Job Openings for MEMS Engineer in Chicago, IL

What does a MEMS Engineer do?

Common responsibilities of a MEMS Engineer

Require solid computer skills using Microsoft Office, Proficient using Microsoft Word and Excel.

September 13, 2022

Create and analyze statistically designed experiments to effectively evaluate process corners to identify major risks and ensure margin for high volume applications.

March 29, 2023

Drive yield improvements through advanced automated wafer inspection.

April 07, 2023

Document and present process changes and experimental results to process review board.

April 19, 2023

Submit Other Responsibilities

Not the job you're looking for? Search more salaries here:

Are you an HR manager or compensation specialist?

Salary.com's CompAnalyst platform offers:

Detailed skills and competency reports for specific positions
Job and employee pricing reports
Compensation data tools, salary structures, surveys and benchmarks.

Learn about

MEMS Engineer Salary By Experience Levels in Chicago, IL

How much should you be earning in MEMS Engineer in Chicago, IL based on your current experience?

Tell us how much experience you have and see an estimate of earnings and view how different experience leavels impact potential pay for MEMS Engineer in Chicago, IL

RELEVANT JOB EXPERIENCE

Length of experience is a pay differentiator. Those with greater experience may have an advantage in negotiating salary. For those with less experience, other factors such as education or special skills could impact your pay. Please visit Professional Salary Report for more details.

MEMS Engineer Salary By Level of Education in Chicago, IL

Do you know how much should you be paid for a MEMS Engineer position in Chicago, IL based on your education level?

Tell us about your education and see an estimate of earnings for MEMS Engineer in Chicago, IL and well to know the impact of education on future careers.

LEVEL OF EDUCATION

Depending on the job, educational levels may have a significant impact on pay levels. Be informed and understand how things like education and certifications can help to increase potential earnings for the career you are interested in. Please visit Professional Salary Report for more details.

Average Salary Range for MEMS Engineer in Chicago, IL

Average Base Salary

Core compensation

161530

191795

176556

Average Total Cash Compensation

Includes base and annual incentives

168914

206439

186330

What is the average salary for MEMS Engineer in 2025?

These charts show the average base salary (core compensation), as well as the average total cash compensation for the job of MEMS Engineer in Chicago, IL. The base salary for MEMS Engineer ranges from $161,530 to $191,795 with the average base salary of $176,556. The total cash compensation, which includes base, and annual incentives, can vary anywhere from $168,914 to $206,439 with the average total cash compensation of $186,330.

View Average Salary for MEMS Engineer as table

	Average Salary	Average Salary Range
Base Salary	$176,556	$161,530 - $191,795
Bonus	$9,774	$7,384 - $14,645
Total Pay	$186,330	$168,914 - $206,439

* Base Salary represents gross income before taxes and deductions. It does not include additional pay such as benefits, bonuses, profit sharing or commissions.

* Total Pay combines base salary, bonuses, profit sharing, tips, commissions, overtime pay and other forms of cash earnings, as applicable for this job.

MEMS Engineer Salary Near Chicago, IL

CITY, STATE	AVERAGE SALARY RANGE	COMPARE TO Chicago, IL
CITY, STATE Cicero, IL	AVERAGE SALARY RANGE $162,438 - $192,873	COMPARE TO Chicago, IL
CITY, STATE Oak Park, IL	AVERAGE SALARY RANGE $162,438 - $192,873	COMPARE TO Chicago, IL
CITY, STATE Oak Lawn, IL	AVERAGE SALARY RANGE $162,253 - $192,654	COMPARE TO Chicago, IL
CITY, STATE Evanston, IL	AVERAGE SALARY RANGE $162,377 - $192,800	COMPARE TO Chicago, IL
CITY, STATE Skokie, IL	AVERAGE SALARY RANGE $162,377 - $192,800	COMPARE TO Chicago, IL
CITY, STATE Arlington Heights, IL	AVERAGE SALARY RANGE $158,741 - $188,484	COMPARE TO Chicago, IL

See salaries for MEMS Engineer in locations close to Chicago, IL. Pay for the same job may vary based on the location and on the location and on other factors such as the size of company, the industry, and other local conditions.

About Chicago, Illinois

Chicago (/ʃɪˈkɑːɡoʊ/ (listen), locally also /-ˈkɔː-/), officially the City of Chicago, is the most populous city in Illinois, as well as the third most populous city in the United States. With an estimated population of 2,716,450 (2017), it is the most populous city in the Midwest. Chicago is the principal city of the Chicago metropolitan area, often referred to as Chicagoland, and the county seat of Cook County, the second most populous county in the United States. The metropolitan area, at nearly 10 million people, is the third-largest in the United States, and the fourth largest in North A...

Source: Wikipedia (as of 04/11/2019). Read more from Wikipedia

View Salary for Similar Jobs to MEMS Engineer in Chicago, IL

See Additional Similar Jobs

Loading results...

Discover how your pay is adjusted for skills, experience, and other factors

How much should you be paid?

For a real-time salary target, tell us more about your role in the four categories below.